======	He	-300	into	YBCO	=======									
	SRIM-2013.00													
==================================================														
	ION	and	final	RECOIL	ATOM	Distributions								
	See	SRIM	Outputs\TDATA.txt	for	calculation	details								
==================================================														
See	file	:	SRIM	Outputs\TDATA.txt	for	details	of	calculation						
	Ion	=	He	Energy	=	2000	keV							
=============	TARGET	MATERIAL	======================================											
Layer	1	:	YBCO											
Layer	Width	=	5.00E+04	A	Layer	#	-1	Density	=	7.54E+22	atoms/cm3	=	6.414	g/cm3
	Layer	#	-1	Y	=	7.69	Atomic	Percent	=	13.3	Mass	Percent		
	Layer	#	-1	Ba	=	15.3	Atomic	Percent	=	41.2	Mass	Percent		
	Layer	#	-1	Cu	=	23	Atomic	Percent	=	28.6	Mass	Percent		
	Layer	#	-1	O	=	53.8	Atomic	Percent	=	16.8	Mass	Percent		
====================================================================														
	Total	Ions	calculated	99999										
	Ion	Average	Range	=	4.13E+04	A	Straggling	=	2.21E+03	A				
	Ion	Lateral	Range	=	2.79E+03	A	Straggling	=	3.68E+03	A				
	Ion	Radial	Range	=	4.38E+03	A	Straggling	=	2.81E+03	A				
====================================================================														
	Transmitted	Ions	=;	Backscattered	Ions	11								
	(These	are	not	included	in	Skewne-	and	Kurtosis	below.)					
														
	Range	Skewne-	=	-3.8575	&=	[-(X-Rp)^3]/[N*Straggle^3]								
	Range	Kurtosis	=	37.2833	&=	[-(X-Rp)^4]/[N*Straggle^4]								
	Statistical	definitions	above	are	those	used	in	VLSI	implant	modelling.				
====================================================================														
=================================================================														
	Table	Distribution	Units	are	>>>	(Atoms/cm3)	/	(Atoms/cm2)	<<<					
=================================================================														
DEPTH	He	Y	Ba	Cu	O									
(Ang.)	Ions	Tgt.	Atoms	Tgt.	Atoms	Tgt.	Atoms	Tgt.	Atoms					
-----------	----------	----------	----------	----------	----------	total displaced target atoms per cm thickness per ion incident	displaced atom total in slice							
5.00E+02	2.00E+00	1.68E+03	3.40E+03	2.98E+03	7.18E+03	1.52E+04	7.62E-02							
1.00E+03	0.00E+00	5.21E+03	1.06E+04	8.65E+03	2.16E+04	4.61E+04	2.30E-01							
1.50E+03	2.00E+00	7.62E+03	1.57E+04	1.29E+04	3.31E+04	6.93E+04	3.46E-01							
2.00E+03	2.00E+00	6.80E+03	1.38E+04	1.15E+04	2.97E+04	6.18E+04	3.09E-01							
2.50E+03	0.00E+00	6.52E+03	1.30E+04	1.10E+04	2.72E+04	5.77E+04	2.88E-01							
3.00E+03	0.00E+00	5.87E+03	1.25E+04	9.68E+03	2.39E+04	5.19E+04	2.59E-01							
3.50E+03	0.00E+00	7.26E+03	1.45E+04	1.18E+04	2.99E+04	6.34E+04	3.17E-01							
4.00E+03	2.00E+00	7.25E+03	1.46E+04	1.23E+04	3.13E+04	6.54E+04	3.27E-01							
4.50E+03	2.00E+00	7.87E+03	1.61E+04	1.37E+04	3.52E+04	7.29E+04	3.64E-01							
5.00E+03	0.00E+00	7.40E+03	1.52E+04	1.23E+04	3.05E+04	6.54E+04	3.27E-01							
5.50E+03	1.00E+01	6.11E+03	1.33E+04	1.09E+04	2.67E+04	5.70E+04	2.85E-01							
6.00E+03	0.00E+00	7.26E+03	1.43E+04	1.26E+04	3.04E+04	6.46E+04	3.23E-01							
6.50E+03	2.00E+00	6.86E+03	1.38E+04	1.14E+04	2.77E+04	5.98E+04	2.99E-01							
7.00E+03	0.00E+00	8.00E+03	1.63E+04	1.36E+04	3.41E+04	7.20E+04	3.60E-01							
7.50E+03	0.00E+00	7.60E+03	1.54E+04	1.31E+04	3.28E+04	6.90E+04	3.45E-01							
8.00E+03	4.00E+00	7.57E+03	1.51E+04	1.31E+04	3.30E+04	6.88E+04	3.44E-01							
8.50E+03	0.00E+00	7.71E+03	1.60E+04	1.36E+04	3.29E+04	7.02E+04	3.51E-01							
9.00E+03	0.00E+00	8.67E+03	1.70E+04	1.46E+04	3.63E+04	7.65E+04	3.83E-01							
9.50E+03	0.00E+00	7.41E+03	1.57E+04	1.29E+04	3.22E+04	6.82E+04	3.41E-01							
1.00E+04	4.00E+00	8.98E+03	1.76E+04	1.55E+04	3.92E+04	8.13E+04	4.06E-01							
1.05E+04	6.00E+00	7.12E+03	1.50E+04	1.25E+04	2.99E+04		Total							
1.10E+04	4.00E+00	8.20E+03	1.67E+04	1.40E+04	3.48E+04		6.28E+00	Av no of disolaced atoms per incident ion						
1.15E+04	0.00E+00	8.38E+03	1.75E+04	1.44E+04	3.64E+04									
1.20E+04	1.20E+01	8.10E+03	1.64E+04	1.35E+04	3.34E+04									
1.25E+04	4.00E+00	9.16E+03	1.83E+04	1.53E+04	3.88E+04									
1.30E+04	8.00E+00	1.02E+04	2.07E+04	1.74E+04	4.44E+04									
1.35E+04	2.00E+00	9.34E+03	1.87E+04	1.62E+04	3.98E+04									
1.40E+04	4.00E+00	8.88E+03	1.81E+04	1.50E+04	3.70E+04									
1.45E+04	1.00E+01	9.26E+03	1.81E+04	1.54E+04	3.74E+04									
1.50E+04	4.00E+00	1.03E+04	2.01E+04	1.71E+04	4.38E+04									
1.55E+04	4.00E+00	1.10E+04	2.16E+04	1.84E+04	4.62E+04									
1.60E+04	1.00E+01	1.00E+04	1.95E+04	1.63E+04	4.09E+04									
1.65E+04	6.00E+00	1.10E+04	2.29E+04	1.97E+04	4.96E+04									
1.70E+04	6.00E+00	1.09E+04	2.19E+04	1.84E+04	4.74E+04									
1.75E+04	1.40E+01	1.07E+04	2.20E+04	1.86E+04	4.56E+04									
1.80E+04	4.00E+00	1.04E+04	2.11E+04	1.76E+04	4.39E+04									
1.85E+04	2.00E+00	1.22E+04	2.43E+04	2.03E+04	5.24E+04									
1.90E+04	1.40E+01	1.22E+04	2.48E+04	2.10E+04	5.42E+04									
1.95E+04	2.00E+01	1.19E+04	2.43E+04	2.09E+04	5.32E+04									
2.00E+04	1.40E+01	1.19E+04	2.35E+04	1.98E+04	4.90E+04									
2.05E+04	1.80E+01	1.17E+04	2.37E+04	2.00E+04	4.98E+04									
2.10E+04	1.40E+01	1.28E+04	2.61E+04	2.20E+04	5.56E+04									
2.15E+04	2.00E+01	1.40E+04	2.72E+04	2.38E+04	6.07E+04									
2.20E+04	2.40E+01	1.38E+04	2.77E+04	2.35E+04	5.93E+04									
2.25E+04	2.40E+01	1.47E+04	2.94E+04	2.55E+04	6.39E+04									
2.30E+04	1.40E+01	1.37E+04	2.76E+04	2.33E+04	5.93E+04									
2.35E+04	2.20E+01	1.47E+04	2.95E+04	2.58E+04	6.40E+04									
2.40E+04	2.20E+01	1.56E+04	3.25E+04	2.68E+04	6.90E+04									
2.45E+04	3.60E+01	1.76E+04	3.48E+04	3.03E+04	7.78E+04									
2.50E+04	3.40E+01	1.68E+04	3.44E+04	2.93E+04	7.44E+04									
2.55E+04	3.00E+01	1.67E+04	3.37E+04	2.90E+04	7.28E+04									
2.60E+04	2.60E+01	1.64E+04	3.35E+04	2.82E+04	7.05E+04									
2.65E+04	3.00E+01	1.81E+04	3.61E+04	3.16E+04	7.92E+04									
2.70E+04	5.40E+01	1.92E+04	3.83E+04	3.27E+04	8.17E+04									
2.75E+04	4.60E+01	1.87E+04	3.72E+04	3.18E+04	7.96E+04									
2.80E+04	5.40E+01	2.17E+04	4.30E+04	3.74E+04	9.56E+04									
2.85E+04	6.20E+01	2.18E+04	4.41E+04	3.78E+04	9.64E+04									
2.90E+04	6.20E+01	2.32E+04	4.59E+04	4.01E+04	1.02E+05									
2.95E+04	8.00E+01	2.32E+04	4.57E+04	3.93E+04	9.90E+04									
3.00E+04	6.60E+01	2.53E+04	4.98E+04	4.39E+04	1.11E+05									
3.05E+04	8.60E+01	2.52E+04	5.07E+04	4.40E+04	1.10E+05									
3.10E+04	1.02E+02	2.74E+04	5.38E+04	4.73E+04	1.20E+05									
3.15E+04	1.14E+02	2.86E+04	5.76E+04	5.00E+04	1.25E+05									
3.20E+04	1.38E+02	3.12E+04	6.20E+04	5.38E+04	1.38E+05									
3.25E+04	1.52E+02	3.24E+04	6.52E+04	5.68E+04	1.42E+05									
3.30E+04	1.96E+02	3.41E+04	6.86E+04	5.91E+04	1.52E+05									
3.35E+04	2.28E+02	3.78E+04	7.52E+04	6.58E+04	1.70E+05									
3.40E+04	3.12E+02	4.05E+04	7.97E+04	6.94E+04	1.78E+05									
3.45E+04	3.38E+02	4.47E+04	8.89E+04	7.81E+04	2.00E+05									
3.50E+04	5.36E+02	4.85E+04	9.59E+04	8.45E+04	2.18E+05									
3.55E+04	5.90E+02	5.32E+04	1.05E+05	9.23E+04	2.39E+05									
3.60E+04	7.54E+02	5.94E+04	1.17E+05	1.03E+05	2.66E+05									
3.65E+04	8.90E+02	6.43E+04	1.28E+05	1.14E+05	2.90E+05									
3.70E+04	1.33E+03	7.64E+04	1.50E+05	1.33E+05	3.43E+05									
3.75E+04	1.92E+03	8.72E+04	1.72E+05	1.52E+05	3.99E+05									
3.80E+04	2.41E+03	1.00E+05	1.99E+05	1.75E+05	4.60E+05									
3.85E+04	3.42E+03	1.18E+05	2.29E+05	2.06E+05	5.39E+05									
3.90E+04	4.68E+03	1.38E+05	2.66E+05	2.41E+05	6.31E+05									
3.95E+04	6.89E+03	1.64E+05	3.18E+05	2.88E+05	7.65E+05									
4.00E+04	9.94E+03	1.99E+05	3.81E+05	3.49E+05	9.29E+05									
4.05E+04	1.36E+04	2.31E+05	4.41E+05	4.06E+05	1.09E+06									
4.10E+04	1.85E+04	2.58E+05	4.90E+05	4.52E+05	1.24E+06									
4.15E+04	2.35E+04	2.72E+05	5.15E+05	4.81E+05	1.33E+06									
4.20E+04	2.71E+04	2.58E+05	4.89E+05	4.58E+05	1.29E+06									
4.25E+04	2.79E+04	2.16E+05	4.04E+05	3.82E+05	1.10E+06									
4.30E+04	2.39E+04	1.52E+05	2.83E+05	2.68E+05	7.85E+05									
4.35E+04	1.67E+04	8.51E+04	1.54E+05	1.49E+05	4.48E+05									
4.40E+04	8.62E+03	3.64E+04	6.72E+04	6.45E+04	1.96E+05									
4.45E+04	3.26E+03	1.17E+04	2.09E+04	2.00E+04	6.47E+04									
4.50E+04	9.72E+02	2.91E+03	5.15E+03	5.16E+03	1.62E+04									
4.55E+04	1.76E+02	4.76E+02	8.02E+02	8.38E+02	2.70E+03									
4.60E+04	2.60E+01	5.00E+01	7.40E+01	7.80E+01	2.82E+02									
4.65E+04	4.00E+00	0.00E+00	6.00E+00	8.00E+00	3.00E+01									
4.70E+04	0.00E+00	0.00E+00	0.00E+00	0.00E+00	0.00E+00									
4.75E+04	0.00E+00	0.00E+00	0.00E+00	0.00E+00	0.00E+00									
4.80E+04	0.00E+00	0.00E+00	0.00E+00	0.00E+00	0.00E+00									
4.85E+04	0.00E+00	0.00E+00	0.00E+00	0.00E+00	0.00E+00									
4.90E+04	0.00E+00	0.00E+00	0.00E+00	0.00E+00	0.00E+00									
4.95E+04	0.00E+00	0.00E+00	0.00E+00	0.00E+00	0.00E+00									
5.00E+04	0.00E+00	0.00E+00	0.00E+00	0.00E+00	0.00E+00									